@inproceedings{rufer:hal-01128323,
TITLE = {Large band MEMS microphone for high frequency acoustic applications in air (10 kHz -1MHz)},
AUTHOR = {Rufer, Libor and Koumela, A. and Zhou, Z. and Wong, M. and Ollivier, S. and Salze, E. and Yuldashev, P. and Basrour, Skandar},
URL = {https://hal.science/hal-01128323},
BOOK
TITLE = {12th Congr{\`e}s Fran{\c c}ais d'Acoustique, Poitiers, France},
ADDRESS = {Poitiers, France},
SERIES = {Proceedings of 12th Congr{\`e}s Fran{\c c}ais d'Acoustique, Poitiers, France},
PAGES = {203-207},
YEAR = {2014},
MONTH = Apr, HAL_ID = {hal-01128323},
HAL_VERSION = {v1},
}
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