@inproceedings{bonnaud:hal-01125852,
TITLE = {The Multidisciplinary Approach: a common trend for ULSI and Thin Film Technology},
AUTHOR = {Bonnaud, Olivier},
URL = {https://hal.science/hal-01125852},
BOOK
TITLE = {ULSI VS TFT 2015},
ADDRESS = {Lake Tahoe, United States},
YEAR = {2015},
MONTH = Jun, HAL_ID = {hal-01125852},
HAL_VERSION = {v1},
}