@inproceedings{cherfi:hal-01121718,
TITLE = {Effect of the substrate-holder bias voltage on the physical and chemical properties of a Si:H thin films prepared by DC magnetron sputtering},
AUTHOR = {Cherfi, R. and Benabdelmoumen, A. and Kechouane, M. and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-01121718},
BOOK
TITLE = {Conference on Thin Film Transistors ITC 2015},
ADDRESS = {Rennes, France},
PAGES = {101-102},
YEAR = {2015},
MONTH = Feb, HAL_ID = {hal-01121718},
HAL_VERSION = {v1},
}