@inproceedings{cherfi:hal-01121712,
TITLE = {Correlation between quality and thickness of $\mu$c-Si film deposited below 180{\textdegree}C by PECVD and TFTS characteristics},
AUTHOR = {Cherfi, R. and Kandoussi, Khalid and Coulon, Nathalie . and Simon, Claude and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-01121712},
BOOK
TITLE = {Conference on Thin Film Transistors ITC 2015},
ADDRESS = {Rennes, France},
YEAR = {2015},
MONTH = Feb, HAL_ID = {hal-01121712},
HAL_VERSION = {v1},
}