@inproceedings{legendre:hal-01109307,
TITLE = {Effect of reactive magnetron sputtering parameters on structural and dielectric properties of (Sr_1-xLa_x)₂(Ta_1-xTi_x)₂O_pN_q oxide and oxynitride thin films},
AUTHOR = {Le Gendre, Laurent and Jacq, Simon and Le Paven-Thivet, Claire and Benzerga, Ratiba and Bouchilaoun, Meriem and Traore Mantion, St{\'e}phane and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Castel, Xavier},
URL = {https://hal.science/hal-01109307},
BOOK
TITLE = {S{\'e}minaire sur invitation},
ADDRESS = {Tokushima, Japan},
ORGANIZATION = {Prof. Moriga - Universit{\'e} de Tokushima},
YEAR = {2014},
MONTH = Oct, HAL_ID = {hal-01109307},
HAL_VERSION = {v1},
}