@inproceedings{legendre:hal-01109301,
TITLE = {Growth and properties of RF-sputtered (Sr,La)-(Ta,Ti)-O-N oxide and oxynitride thin films},
AUTHOR = {Le Gendre, Laurent and Jacq, Simon and Le Paven-Thivet, Claire and Benzerga, Ratiba and Bouchilaoun, Meriem and Traore Mantion, St{\'e}phane and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Castel, Xavier},
URL = {https://hal.science/hal-01109301},
BOOK
TITLE = {S{\'e}minaire sur invitation},
ADDRESS = {Chiba, Japan},
ORGANIZATION = {Prof. Uekawa - Universit{\'e} de Chiba - Japon},
YEAR = {2014},
MONTH = Oct, HAL_ID = {hal-01109301},
HAL_VERSION = {v1},
}