@inproceedings{jacq:hal-01109296,
TITLE = {Structural and dielectric characterization of (Sr,La)-(Ta,Ti)-O-N oxide and oxynitride thin films grown by RF reactive magnetron sputtering},
AUTHOR = {Jacq, Simon and Le Gendre, Laurent and Le Paven-Thivet, Claire and Benzerga, Ratiba and Bouchilaoun, Meriem and Traore Mantion, St{\'e}phane and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Castel, Xavier},
URL = {https://hal.science/hal-01109296},
BOOK
TITLE = {The 4th NIMS-UR1 Workshop 2014},
ADDRESS = {Tsukuba, Japan},
ORGANIZATION = {NIMS},
YEAR = {2014},
MONTH = Oct, HAL_ID = {hal-01109296},
HAL_VERSION = {v1},
}