@article{lepaven:hal-01102057,
TITLE = {Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure},
AUTHOR = {Le Paven, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Chevir{\'e},
Fran{\c c}ois and Tessier, Franck and Jacq, S. and Traor{\'e}-Mantion, S. and Sharaiha, Ala},
URL = {https://hal.science/hal-01102057},
JOURNAL = {Journal of Crystal Growth},
PUBLISHER = {Elsevier},
VOLUME = {413},
PAGES = {5-11},
YEAR = {2015},
MONTH = Mar, DOI = {10.1016/j.jcrysgro.2014.12.001},
KEYWORDS = {Dielectric materials ; Physical vapor deposition processes ; X-ray diffraction ; Perovskites ; Nitrides ; Oxides},
PDF = {https://hal.science/hal-01102057/file/Growth%20of%20%28sr%2Cla%29-%28ta%2Cti%29-O-N%20perovskite%20oxide.pdf},
HAL_ID = {hal-01102057},
HAL_VERSION = {v1},
}