@article{legeay:hal-01060034,
TITLE = {Low-cost photomask fabrication using laser ablation},
AUTHOR = {Legeay, G{\'e}rard and Castel, Xavier and Benzerga, Ratiba and Moussavou, Arnaud-Gides and Sauleau, Ronan and Guilloux-Viry, Maryline},
URL = {https://hal.science/hal-01060034},
JOURNAL = {Journal of Materials Processing Technology},
PUBLISHER = {Elsevier},
VOLUME = {216},
PAGES = {71-78},
YEAR = {2015},
DOI = {10.1016/j.jmatprotec.2014.08.024},
KEYWORDS = {Titanium film ; Photomask ; Laser ablation ; Patterning ; Nitrocellulose lacquer},
PDF = {https://hal.science/hal-01060034/file/Low-cost_photomask-_accepted.pdf},
HAL_ID = {hal-01060034},
HAL_VERSION = {v1},
}