@inproceedings{jacq:hal-01020057,
TITLE = {D{\'e}p{\^o}t et caract{\'e}risation di{\'e}lectrique de couches minces d'oxydes et d'oxynitrures perovskites},
AUTHOR = {Jacq, Simon and Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Traore Mantion, St{\'e}phane and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Castel, Xavier},
URL = {https://hal.science/hal-01020057},
BOOK
TITLE = {13{\`e}mes Journ{\'e}es de Caract{\'e}risation Microondes et Mat{\'e}riaux (JCMM 2014)},
ADDRESS = {Nantes, France},
YEAR = {2014},
MONTH = Mar, HAL_ID = {hal-01020057},
HAL_VERSION = {v1},
}