@inproceedings{lepaventhivet:hal-01019911,
TITLE = {Functional dielectric oxide and oxynitride perovskite thin films deposited by reactive magnetron sputtering},
AUTHOR = {Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Lu, Yu and Nguyen, Viet Hung and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Jacq, Simon and Rioual, St{\'e}phane and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier},
URL = {https://hal.science/hal-01019911},
BOOK
TITLE = {Microwave Materials and their Application (MMA 2014)},
ADDRESS = {Boston, Idaho, United States},
YEAR = {2014},
MONTH = Jun, HAL_ID = {hal-01019911},
HAL_VERSION = {v1},
}