@misc{salaun:hal-00963651,
TITLE = {Setting of microtechnology tutorials using surface micromachining},
AUTHOR = {Sala{\"u}n, Anne-Claire and Kotb, H.E. and Mohammed-Brahim, Tayeb and Le Bihan, France and Coulon, Nathalie . and Lhermite, Herv{\'e} and Bonnaud, Olivier},
URL = {https://hal.science/hal-00963651},
NOTE = {EWME 2002, Poster},
YEAR = {2002},
MONTH = May, HAL_ID = {hal-00963651},
HAL_VERSION = {v1},
}