@inproceedings{leguillerm:hal-00960571,
TITLE = {Elaboration in-situ de couches d'ITO par pulv{\'e}risation cathodique {\`a} temp{\'e}rature ambiante},
AUTHOR = {Le Guillerm, Tual and Vigneron, Sonia and Castel, Xavier and Legeay, G{\'e}rard and Pinel, Jacques},
URL = {https://hal.science/hal-00960571},
BOOK
TITLE = {Journ{\'e}es de caract{\'e}risation Micro-ondes et Mat{\'e}riaux},
ADDRESS = {Toulouse, France},
YEAR = {2002},
MONTH = Mar, HAL_ID = {hal-00960571},
HAL_VERSION = {v1},
}