@inproceedings{rogel:hal-00958794,
TITLE = {Influence of precursor gases on LPCVD polysilicon TFT 92s characteristics},
AUTHOR = {Rogel, R{\'e}gis and Gautier, G. and Coulon, Nathalie . and Sarret, Michel and Bonnaud, Olivier},
URL = {https://hal.science/hal-00958794},
NOTE = {Oral presentation},
BOOK
TITLE = {E-MRS 2002, Spring meeting},
ADDRESS = {Strasbourg, France},
YEAR = {2002},
MONTH = Jun, HAL_ID = {hal-00958794},
HAL_VERSION = {v1},
}