@inproceedings{kervran:hal-00955098,
TITLE = {Microcrystalline silicon gauges on flexible substrates for high deformations with high spatial resolution},
AUTHOR = {Kervran, Yannick and Janfaoui, Sabri and de Sagazan, Olivier and Crand, Samuel and Coulon, Nathalie . and Gauthier, Jean-Philippe and Mohammed-Brahim, Tayeb},
URL = {https://univ-rennes.hal.science/hal-00955098},
BOOK
TITLE = {Sensing Technology (ICST), 2013 Seventh International Conference on},
ADDRESS = {Wellington, New Zealand},
PAGES = {603-607},
YEAR = {2013},
MONTH = Dec, DOI = {10.1109/ICSensT.2013.6727724},
KEYWORDS = {Microcrystalline silicon ; strain gauge ; spatial resolution ; flexible substrate ; resistor ; transistor},
PDF = {https://univ-rennes.hal.science/hal-00955098/file/ICST13_Univ_Rennes1.pdf},
HAL_ID = {hal-00955098},
HAL_VERSION = {v1},
}