@inproceedings{mahfozkotb:hal-00954226,
TITLE = {Silicon films deposited by LPCVD for microsystems},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Bendriaa, F. and Le Bihan, France and Bonnaud, Olivier},
URL = {https://hal.science/hal-00954226},
BOOK
TITLE = {Polyse 2002},
ADDRESS = {Nara, Japan},
YEAR = {2002},
MONTH = Sep, HAL_ID = {hal-00954226},
HAL_VERSION = {v1},
}