@inproceedings{mahfozkotb:hal-00954221,
TITLE = {Polycristalline silicon thin films for mems applications},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Le Bihan, France},
URL = {https://hal.science/hal-00954221},
NOTE = {Poster},
BOOK
TITLE = {EMRS 2002},
ADDRESS = {Strasbourg, France},
YEAR = {2002},
MONTH = Jun, HAL_ID = {hal-00954221},
HAL_VERSION = {v1},
}