@inproceedings{desagazan:hal-00943234,
TITLE = {MOSFET on Thin Si Diaphragm as Pressure Sensor},
AUTHOR = {de Sagazan, Olivier and Jacques, Emmanuel and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00943234},
BOOK
TITLE = {26th Symposium on Microelectronics Technology and Devices (SBMicro)},
ADDRESS = {Joao Pessoa, Brazil},
EDITOR = {Pavanello MA; Freire RCS; Naviner JF; Bonnaud O},
VOLUME = {39},
NUMBER = {1},
PAGES = {329-336},
YEAR = {2011},
MONTH = Aug, DOI = {10.1149/1.3615210},
HAL_ID = {hal-00943234},
HAL_VERSION = {v1},
}