@inproceedings{mohammedbrahim:hal-00936178,
TITLE = {Making high performance silicon devices on low temperature substrates},
AUTHOR = {Mohammed-Brahim, Tayeb and Bonnaud, Olivier},
URL = {https://hal.science/hal-00936178},
BOOK
TITLE = {Invited Paper, SBMicro'2002, 17 th Symposium on Microelectronics Technology and Devices},
ADDRESS = {Porto Alegre, Brazil},
YEAR = {2002},
MONTH = Sep, HAL_ID = {hal-00936178},
HAL_VERSION = {v1},
}