@article{munster:hal-00934156,
TITLE = {Polycristalline silicon deposited on glass by sub-atmospheric-pressure CVD at high rate},
AUTHOR = {M{\"u}nster, P. and Sarret, Michel and Mohammed-Brahim, Tayeb and Coulon, Nathalie . and Mevellec, J.-Y.},
URL = {https://hal.science/hal-00934156},
JOURNAL = {Philosophical Magazine B},
PUBLISHER = {Informa UK (Taylor \& Francis)},
YEAR = {2002},
MONTH = May, HAL_ID = {hal-00934156},
HAL_VERSION = {v1},
}