@article{gautier:hal-00933274,
TITLE = {Polysilicon CMOS TFTs inverters with a gate silicon oxide deposited using PECVD with hexamethyldisiloxane (HMDSO)},
AUTHOR = {Gautier, G. and Coulon, Nathalie . and Viana, C.E. and Crand, Samuel and Rogel, Regis and Morimoto, N.I. and Bonnaud, Olivier},
URL = {https://hal.science/hal-00933274},
NOTE = {8 pages},
JOURNAL = {Polycristalline Semiconductors VI},
VOLUME = {2002-23},
PAGES = {55-62},
YEAR = {2002},
MONTH = Oct, HAL_ID = {hal-00933274},
HAL_VERSION = {v1},
}