@misc{vigneron:hal-00930053,
TITLE = {Microtechnologie de l'oxyde semiconducteur ITO en couche mince},
AUTHOR = {Vigneron, Sonia and Castel, Xavier and Legeay, G{\'e}rard and Pinel, Jacques},
URL = {https://hal.science/hal-00930053},
NOTE = {Journ{\'e}es Scientifiques et Technologiques Gab{\`e}s/C{\^o}tes d{\'A}rmor; 3 pages; Gab{\`e}s (Tunisie); 7-9 mai 2003},
YEAR = {2003},
MONTH = May, HAL_ID = {hal-00930053},
HAL_VERSION = {v1},
}