@misc{bonnaud:hal-00929839,
TITLE = {Evolution de la technologie des composants en couches minces au sein de GM/IETR},
AUTHOR = {Bonnaud, Olivier and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00929839},
NOTE = {S{\'e}minaire au LETI-CEA; pr{\'e}sentation orale; Grenoble; 20 octobre 2003},
YEAR = {2003},
MONTH = Oct, HAL_ID = {hal-00929839},
HAL_VERSION = {v1},
}