@inproceedings{salaun:hal-00921622,
TITLE = {Fabrication et caract{\'e}risation {\'e}lectrique d'un capteur de gaz {\`a} base de nanofils de silicium suspendus},
AUTHOR = {Sala{\"u}n, Anne-Claire and Rogel, R{\'e}gis and Jacques, Emmanuel and Pichon, Laurent},
URL = {https://hal.science/hal-00921622},
BOOK
TITLE = {Douzi{\`e}mes journ{\'e}es p{\'e}dagogiques du Comit{\'e} National de Formation en Micro{\'e}lectronique},
ADDRESS = {St Malo, France},
PAGES = {85-89},
YEAR = {2013},
MONTH = Nov, HAL_ID = {hal-00921622},
HAL_VERSION = {v1},
}