@inproceedings{jacques:hal-00921610,
TITLE = {Grounded and suspended polysilicon nanowires for gas sensing applications},
AUTHOR = {Jacques, Emmanuel and Thomas, Maxime and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-00921610},
BOOK
TITLE = {Worshop GDR ''Nanofils, Nanotubes, Semiconducteurs''},
ADDRESS = {Rennes, France},
YEAR = {2012},
MONTH = Nov, HAL_ID = {hal-00921610},
HAL_VERSION = {v1},
}