@inproceedings{mahfozkotb:hal-00921451,
TITLE = {Transistors {\`a} grille suspendue en silicium polycristallin : Influence de la couche sacrificielle sur le maintien m{\'e}canique et sur le proc{\'e}d{\'e} de fabrication. Application comme capteurs actifs d'ambiance},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Coulon, Nathalie . and Bonnaud, Olivier},
URL = {https://hal.science/hal-00921451},
BOOK
TITLE = {Journ{\'e}es RMNT},
ADDRESS = {Lille, France},
YEAR = {2003},
MONTH = Nov, HAL_ID = {hal-00921451},
HAL_VERSION = {v1},
}