@inproceedings{zaghdoudi:hal-00919741,
TITLE = {Control of the Weak Phosphorus Doping in Polysilicon},
AUTHOR = {Zaghdoudi, Mariem and Abdelkrim, M.N. and Fathallah, M. and Mohammed-Brahim, Tayeb and Le Bihan, France},
URL = {https://hal.science/hal-00919741},
BOOK
TITLE = {International Meeting on Applied Physics (APHYS 2003)},
ADDRESS = {Badajoz, Spain},
YEAR = {2003},
MONTH = Oct, HAL_ID = {hal-00919741},
HAL_VERSION = {v1},
}