@inproceedings{mahfozkotb:hal-00917784,
TITLE = {High performance polysilicon air-gap thin film transistor on low temperature substrates},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Coulon, Nathalie . and Bonnaud, Olivier and Mevellec, Jean-Yves},
URL = {https://hal.science/hal-00917784},
BOOK
TITLE = {Proceedings of SPIE Smart Sensors, Actuators, and MEMS},
ADDRESS = {Maspolomas, Spain},
VOLUME = {5116},
PAGES = {168-175},
YEAR = {2003},
MONTH = May, HAL_ID = {hal-00917784},
HAL_VERSION = {v1},
}