@article{rogel:hal-00913123,
TITLE = {Influence of precursor on LPCVD polysilicon TFT's characteristics},
AUTHOR = {Rogel, Regis and Gautier, G. and Coulon, Nathalie . and Sarret, Michel and Bonnaud, Olivier},
URL = {https://hal.science/hal-00913123},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {427},
PAGES = {108-112},
YEAR = {2003},
MONTH = Mar, HAL_ID = {hal-00913123},
HAL_VERSION = {v1},
}