@article{mahfozkotb:hal-00913044,
TITLE = {Polycrystalline silicon thin films for MEMS applications},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Le Bihan, France and El Marssi, Mimoun},
URL = {https://hal.science/hal-00913044},
JOURNAL = {Thin Solid Films},
HAL_LOCAL_REFERENCE = {ISSN:0040-6090},
PUBLISHER = {Elsevier},
NUMBER = {427},
PAGES = {422-426},
YEAR = {2003},
MONTH = Mar, HAL_ID = {hal-00913044},
HAL_VERSION = {v1},
}