@incollection{bonnaud:hal-00909031,
TITLE = {Poly-Si Thin Film and Substrate Materials},
AUTHOR = {Bonnaud, Olivier and Mohammed-Brahim, Tayeb and Ast, Dieter G.},
URL = {https://hal.science/hal-00909031},
BOOK
TITLE = {Thin Film Transistors Materials and Processes : Volume 2 Polycrystalline Silicon Thin Film Transistors},
EDITOR = {Yue KUO},
PUBLISHER = {Kluwer Academic Publishers},
PAGES = {Chapitre 2 - 75 pages/650},
YEAR = {2004},
HAL_ID = {hal-00909031},
HAL_VERSION = {v1},
}