@inproceedings{vigneron:hal-00906383,
TITLE = {Propri{\'e}t{\'e}s des couches minces d'ITO : influence de la proportion d'oxyg{\`e}ne},
AUTHOR = {Vigneron, Sonia and Castel, Xavier and Legeay, G{\'e}rard and Pinel, Jacques},
URL = {https://hal.science/hal-00906383},
BOOK
TITLE = {8{\`e}mes Journ{\'e}es de Caract{\'e}risation Microondes et Mat{\'e}riaux},
ADDRESS = {La Rochelle, France},
PAGES = {4 pages},
YEAR = {2004},
MONTH = Mar, HAL_ID = {hal-00906383},
HAL_VERSION = {v1},
}