@inproceedings{salaun:hal-00906308,
TITLE = {Etude du stress par caract{\'e}risation de microstructures r{\'e}alis{\'e}es en microtechnologie de surface},
AUTHOR = {Sala{\"u}n, Anne-Claire and Mahfoz-Kotb, H. and Mohammed-Brahim, Tayeb and Bonnaud, Olivier},
URL = {https://hal.science/hal-00906308},
BOOK
TITLE = {J3EA Micro et nano caract{\'e}risation},
ADDRESS = {Montpellier, France},
YEAR = {2004},
MONTH = May, HAL_ID = {hal-00906308},
HAL_VERSION = {v1},
}