@inproceedings{camus:hal-00878878,
TITLE = {Epitaxial growth of AlN thin films at low temperature by magnetron sputtering technique},
AUTHOR = {Camus, Julien and Simon, Quentin and A{\"i}t A{\"i}ssa, Keltouma and Bensalem, Salma and Le Brizoual, Laurent and Tessier, Gilles and Scudeller, Yves and Djouadi, Mohamed Abdou and Cordier, Yvon and Frayssinet, {\'E}ric and de Jaeger, Jean-Claude and Chmielowska, Magdalena and Nemoz, Maud and Venn{\'e}gu{\`e}s, Philippe and Chenot, S{\'e}bastien and Defrance, Nicolas and Lesecq, Marie and Altuntas, Philippe and Cutivet, Adrien and Agboton, Alain},
URL = {https://hal.science/hal-00878878},
BOOK
TITLE = {European Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium J - Semiconductor nanostructures towards electronic and optoelectronic device applications IV},
ADDRESS = {Strasbourg, France},
HAL_LOCAL_REFERENCE = {Communication sans actes \#11540},
YEAR = {2013},
HAL_ID = {hal-00878878},
HAL_VERSION = {v1},
}