@article{lu:hal-00875068,
TITLE = {Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Nguyen, Hung and Benzerga, Ratiba and Le Gendre, Laurent and Rioual, St{\'e}phane and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier},
URL = {https://hal.science/hal-00875068},
JOURNAL = {Crystal Growth \& Design},
PUBLISHER = {American Chemical Society},
PAGES = {4852-4858},
YEAR = {2013},
MONTH = Sep, DOI = {10.1021/cg4010196},
HAL_ID = {hal-00875068},
HAL_VERSION = {v1},
}