@inproceedings{salaun:hal-00870788,
TITLE = {Setting a Tutorial on Thermal Polysilicon-Based Suspensed Actuator Using Surface Microtechnology},
AUTHOR = {Sala{\"u}n, Anne-Claire and Mahfoz-Kotb, H. and Coulon, Nathalie . and Rogel, Regis and Mohammed-Brahim, Tayeb and Bonnaud, Olivier},
URL = {https://hal.science/hal-00870788},
BOOK
TITLE = {EWME 2004 5th European Workshop on Microelectronics Education},
ADDRESS = {Lausanne, Switzerland},
YEAR = {2004},
MONTH = Apr, HAL_ID = {hal-00870788},
HAL_VERSION = {v1},
}