@inproceedings{michaud:hal-00870429,
TITLE = {Solid phase post-treatment of polysilicon films by a continuous argon laser},
AUTHOR = {Michaud, Jean-Fran{\c c}ois and Rogel, Regis and Mohammed-Brahim, Tayeb and Sarret, Michel and Bonnaud, Olivier},
URL = {https://hal.science/hal-00870429},
BOOK
TITLE = {POLYSE 2004},
ADDRESS = {Potdam, Germany},
YEAR = {2004},
MONTH = Sep, HAL_ID = {hal-00870429},
HAL_VERSION = {v1},
}