@inproceedings{lepaventhivet:hal-00869768,
TITLE = {Structural and dielectric characterization of perovskite oxide and oxynitride lanthanum titanium films deposited by reactive sputtering deposition},
AUTHOR = {Le Paven-Thivet, Claire and Lu, Yu and Nguyen, Hung and Benzerga, Ratiba and Le Gendre, Laurent and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://univ-rennes.hal.science/hal-00869768},
BOOK
TITLE = {19th International Vacuum Congress (IVC-19)},
ADDRESS = {Paris, France},
YEAR = {2013},
MONTH = Sep, HAL_ID = {hal-00869768},
HAL_VERSION = {v1},
}