@inproceedings{lepaventhivet:hal-00869754,
TITLE = {Functional dielectric oxide and oxynitride compounds in the perovskite La-Ti-O-N system: from thin film sputtering deposition to dielectric characterization},
AUTHOR = {Le Paven-Thivet, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Lu, Yu and Nguyen, Hung and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Rioual, St{\'e}phane and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier},
URL = {https://univ-rennes.hal.science/hal-00869754},
BOOK
TITLE = {International Symposium on Inorganic and Environmental Materials 2013 (ISIEM 2013)},
ADDRESS = {Rennes, France},
YEAR = {2013},
MONTH = Oct, HAL_ID = {hal-00869754},
HAL_VERSION = {v1},
}