@inproceedings{lu:hal-00855438,
TITLE = {D{\'e}p{\^o}t et caract{\'e}risation de couches minces di{\'e}lectriques La-Ti-O-N},
AUTHOR = {Lu, Yu and Benzegoutta, Dhafira and Nguyen, Viet Hung and Benzerga, Ratiba and Le Paven-Thivet, Claire and Le Gendre, Laurent and Sharaiha, Ala and Delaveaud, Christophe and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-00855438},
BOOK
TITLE = {IBAF 2012 : Ion Beam Analysis Francophone - 4{\`e}me Rencontre ''Analyse par faisceaux d'ions rapides''},
ADDRESS = {Saint-Paul-L{\`e}s-Durance, France},
YEAR = {2012},
MONTH = Dec, HAL_ID = {hal-00855438},
HAL_VERSION = {v1},
}