@inproceedings{fonrodona:hal-00848000,
TITLE = {Low temperature amorphous and nanocrystralline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate},
AUTHOR = {Fonrodona, M. and Soler, D. and Escarr{\'e},
J. and Villar, F. and Bertomeu, J. and Andreu, J. and Saboundji, Amar and Coulon, Nathalie . and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00848000},
BOOK
TITLE = {3rd International Conference on Hot-Wire CVD (Cat-CVD)},
ADDRESS = {Utrecht, Netherlands},
YEAR = {2004},
MONTH = Aug, HAL_ID = {hal-00848000},
HAL_VERSION = {v1},
}