@inproceedings{lu:hal-00846798,
TITLE = {Reactive sputtering deposition of perovskite oxide and oxynitride lanthanum titanium films: structural and dielectric characterization},
AUTHOR = {Lu, Yu and Le Paven-Thivet, Claire and Nguyen, Viet Hung and Benzerga, Ratiba and Le Gendre, Laurent and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala and Delaveaud, Christophe and Castel, Xavier and D{\'e}putier, St{\'e}phanie},
URL = {https://hal.science/hal-00846798},
BOOK
TITLE = {E-MRS 2013 Spring Meeting ''European Material Research Society''},
ADDRESS = {STRASBOURG, France},
YEAR = {2013},
MONTH = May, HAL_ID = {hal-00846798},
HAL_VERSION = {v1},
}