@article{chanson:hal-00806036,
TITLE = {Modeling of inductively coupled plasma Ar/Cl-2/N-2 plasma discharge: Effect of N-2 on the plasma properties.},
AUTHOR = {Chanson, Romain and Rhallabi, A. and Fernandez, Marie-Claude and Cardinaud, Christophe and Landesman, Jean-Pierre},
URL = {https://hal.science/hal-00806036},
JOURNAL = {Journal of Vacuum Science \& Technology A},
PUBLISHER = {American Vacuum Society},
VOLUME = {31},
NUMBER = {1},
PAGES = {011301},
YEAR = {2013},
MONTH = Jan, DOI = {10.1116/1.4766681},
KEYWORDS = {MODULATED HIGH-DENSITY ; ELECTRON COLLISIONS ; RADIATIVE LIFETIME ; CHLORINE PLASMAS ; GLOBAL-MODEL ; FLUID MODEL ; INP ; MOLECULES ; SIDEWALL ; REACTOR},
HAL_ID = {hal-00806036},
HAL_VERSION = {v1},
}