@article{bouhadda:hal-00803343,
TITLE = {Suspended Gate Field Effect Transistor with an Integrated Micro-Fluidic Channel Performed by Surface Micromachining for Liquids Sensing},
AUTHOR = {Bouhadda, Isma{\"i}l and de Sagazan, Olivier and Le Bihan, France},
URL = {https://hal.science/hal-00803343},
JOURNAL = {Procedia Engineering},
PUBLISHER = {Elsevier},
SERIES = {26th European Conference on Solid-State Transducers (Eurosensors) Sep 2012 Krakow},
VOLUME = {47},
PAGES = {754-757},
YEAR = {2012},
DOI = {10.1016/j.proeng.2012.09.257},
HAL_ID = {hal-00803343},
HAL_VERSION = {v1},
}