@inproceedings{bouhadda:hal-00803202,
TITLE = {Technologies pour la r{\'e}alisation de microcanaux int{\'e}gr{\'e}s dans des dispositifs {\'e}lectroniques},
AUTHOR = {Bouhadda, Isma{\"i}l and de Sagazan, Olivier and Le Bihan, France},
URL = {https://hal.science/hal-00803202},
BOOK
TITLE = {JNRDM2012},
ADDRESS = {Marseille, France},
YEAR = {2012},
MONTH = Jun, HAL_ID = {hal-00803202},
HAL_VERSION = {v1},
}