@inproceedings{pichon:hal-00795798,
TITLE = {Fully compatible CMOS technology polysilicon nanowires for integrated gas sensing applications},
AUTHOR = {Pichon, Laurent and Rogel, R{\'e}gis and Sala{\"u}n, Anne-Claire and Jacques, Emmanuel and Demami, Fouad and Godem-Wenga, Gertrude},
URL = {https://hal.science/hal-00795798},
BOOK
TITLE = {Journ{\'e}es GDR ''Nanofils, Nanotubes Semiconducteurs},
ADDRESS = {Porquerolles, France},
YEAR = {2011},
MONTH = Oct, HAL_ID = {hal-00795798},
HAL_VERSION = {v1},
}