@article{legendre:hal-00783526,
TITLE = {Lanthanum titanium oxynitride thin films},
AUTHOR = {Le Gendre, Laurent and Le Paven-Thivet, Claire and Pinel, Jacques and Fasquelle, Didier and Carru, Jean-Claude and Chevir{\'e},
Fran{\c c}ois and Tessier, Franck and Marchand, R.},
URL = {https://hal.science/hal-00783526},
JOURNAL = {Silicates Industriels},
PUBLISHER = {Silicates Industriels},
VOLUME = {69},
NUMBER = {5-6},
PAGES = {165-171},
YEAR = {2004},
MONTH = May, PDF = {https://hal.science/hal-00783526/file/legendre_Silicates%20Industriels_69_2004.pdf},
HAL_ID = {hal-00783526},
HAL_VERSION = {v1},
}