@patent{mohammedbrahim:hal-00779832,
TITLE = {M{\'e}thode de r{\'e}alisation de dispositifs {\'e}lectroniques en couches minces performants},
AUTHOR = {Mohammed-Brahim, Tayeb and Saboundji, Amar and Coulon, Nathalie . and Rogel, R{\'e}gis and Bonnaud, Olivier},
URL = {https://hal.science/hal-00779832},
NUMBER = {Brevet fran{\c c}ais n{\textdegree}0504313},
ADDRESS = {France},
YEAR = {2005},
MONTH = Apr, HAL_ID = {hal-00779832},
HAL_VERSION = {v1},
}