@inproceedings{jacques:hal-00777389,
TITLE = {Micro-syst{\`e}me et capteur int{\'e}gr{\'e}s en technologie couches minces basses temp{\'e}rature},
AUTHOR = {Jacques, Emmanuel and Le Bihan, France and Crand, Samuel},
URL = {https://hal.science/hal-00777389},
BOOK
TITLE = {JNRDM 2005},
ADDRESS = {Paris, France},
YEAR = {2005},
MONTH = May, HAL_ID = {hal-00777389},
HAL_VERSION = {v1},
}