@inproceedings{rasia:hal-00776388,
TITLE = {Piezoresistivity of polysilicon thin films to be applied in pressure sensors},
AUTHOR = {Rasia, L.A. and Viana, C.E. and Rogel, Regis and Morimoto, N.I. and Bonnaud, Olivier},
URL = {https://hal.science/hal-00776388},
BOOK
TITLE = {SBMicro'2005},
ADDRESS = {Florianopolis, Brazil},
YEAR = {2005},
MONTH = Sep, HAL_ID = {hal-00776388},
HAL_VERSION = {v1},
}